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Anne Kenslea
Anne Kenslea
Thermo Fisher Scientific
Metrology
Electronic engineering
Engineering
Nanotechnology
Computer science
4
Papers
8
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0
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Statistical significance of STEM based metrology on advanced 3D transistor structures
2019
Laurens Kwakman
Anne Kenslea
Hayley Johanesen
Jillian Cramer
Michael Strauss
Werner Boullart
Hans Mertens
Yong Kong. Siew
Kathy Barla
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Evaluation of the accuracy and precision of STEM and EDS metrology on horizontal GAA nanowire devices
2019
Hayley Johanesen
Michael Strauss
Anne Kenslea
Chris Hakala
Laurens Kwakman
Werner Boullart
Hans Mertens
Yong Kong. Siew
Kathy Barla
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CD-TEM: Characterizing impact of TEM sample preparation on CD metrology
2018
ASMC | Advanced Semiconductor Manufacturing Conference
Anne Kenslea
Chris Hakala
Zhenxin Zhong
Yinggang Lu
John Fretwell
Jack Hager
Chris Kang
Haiyan Tan
Weihao Weng
Laurent Dumas
Irene Brooks
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CD metrology for EUV lithography and etch
2015
ASMC | Advanced Semiconductor Manufacturing Conference
Hayley Johanesen
Anne Kenslea
Mark Williamson
Matt Knowles
Laurens Kwakman
Jan Van Puymbroeck
Dan Felder
Shimon Levi
Noam Nishry
Ofer Adan
Ilan Englard
Shahar Gov
Oded Cohen
Igor Turovets
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Citations (3)
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