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Chris Hakala

Thermo Fisher Scientific

4

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9

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Evaluation of the accuracy and precision of STEM and EDS metrology on horizontal GAA nanowire devices

2019
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CD-TEM: Characterizing impact of TEM sample preparation on CD metrology

2018 ASMC | Advanced Semiconductor Manufacturing Conference
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Advanced industrial S/TEM automation and metrology: Boundary of precision

2018 ASMC | Advanced Semiconductor Manufacturing Conference
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