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Haiyan Tan
Haiyan Tan
GlobalFoundries
Metrology
Nanotechnology
Electronic engineering
Engineering
Automation
3
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10
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CD-TEM: Characterizing impact of TEM sample preparation on CD metrology
2018
ASMC | Advanced Semiconductor Manufacturing Conference
Anne Kenslea
Chris Hakala
Zhenxin Zhong
Yinggang Lu
John Fretwell
Jack Hager
Chris Kang
Haiyan Tan
Weihao Weng
Laurent Dumas
Irene Brooks
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Citations (2)
Advanced industrial S/TEM automation and metrology: Boundary of precision
2018
ASMC | Advanced Semiconductor Manufacturing Conference
Haiyan Tan
Weihao Weng
Raghaw Rai
Chris Kang
Laurent Dumas
Irene Brooks
Ahmad Katnani
Zhenxin Zhong
Chris Hakala
Yinggang Lu
John Fretwell
Timothy A. Johnson
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Citations (5)
Toward Automated S/TEM Metrology of Advanced CMOS Devices: Journey to Obtain a Precise and Accurate Measurement
2017
Microscopy and Microanalysis
Weihao Weng
Haiyan Tan
Ahmad Katnani
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Citations (3)
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