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Zhenxin Zhong

Thermo Fisher Scientific

5

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12

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CD-TEM: Characterizing impact of TEM sample preparation on CD metrology

2018 ASMC | Advanced Semiconductor Manufacturing Conference
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Advanced industrial S/TEM automation and metrology: Boundary of precision

2018 ASMC | Advanced Semiconductor Manufacturing Conference
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Automation to Enable Energy Dispersive X-ray Spectroscopy for High Throughput Failure Analysis and Metrology

2017
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Automated STEM/EDS Metrology Characterization of 3D NAND Devices

2017 Microscopy and Microanalysis
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Citations (4)