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Hiroshi Yasuda
Hiroshi Yasuda
Fujitsu
Optics
Lithography
Materials science
Electron-beam lithography
Cathode ray
3
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4
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Impact of the coulomb interaction effect on delineating densely repeated 0.1 μm patterns using electron beam block exposure
1997
K. Takahashi
Satoru Yamazaki
Manabu Ohno
Hitoshi Watanabe
Takayuki Sakakibara
Masami Satoh
Takeo Nagata
Akio Yamada
Hiroshi Yasuda
Yasuo Nara
Nobuo Sasaki
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Impact of the Coulomb interaction effect on delineating densely repeated 0.1-μm patterns using electron-beam block exposure
1997
K. Takahashi
Satoru Yamazaki
Manabu Ohno
Hitoshi Watanabe
Takayuki Sakakibara
Masami Satoh
Takeo Nagata
Akio Yamada
Hiroshi Yasuda
Yasuo Nara
Nobuo Sasaki
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Citations (3)
Accuracy of exposure during continuous stage movement in a variable shaped vector scanning EB lithography system
1993
Microelectronic Engineering
Takashi Kiuchi
Akio Yamada
Yasushi Takahashi
Yoshihisa Oae
Mitsuhiro Nakano
Junichi Kai
Hiroshi Yasuda
Kenichi Kawashima
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Citations (1)
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