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Mitsuhiro Nakano
Mitsuhiro Nakano
Fujitsu
Optics
Beam (structure)
Proof of concept
Cell Evaluation
Interference (wave propagation)
4
Papers
10
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Multicolumn cell: Evaluation of the proof of concept system
2004
Journal of Vacuum Science & Technology B
Takeshi Haraguchi
T. Sakazaki
Takamasa Satoh
Mitsuhiro Nakano
Shinichi Hamaguchi
Takashi Kiuchi
Hidefumi Yabara
Hiroshi Yasuda
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Citations (9)
Historical Study of the Toshogu Shrine Kanjo of Daimyo
2002
Mitsuhiro Nakano
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Accuracy of exposure during continuous stage movement in a variable shaped vector scanning EB lithography system
1993
Microelectronic Engineering
Takashi Kiuchi
Akio Yamada
Yasushi Takahashi
Yoshihisa Oae
Mitsuhiro Nakano
Junichi Kai
Hiroshi Yasuda
Kenichi Kawashima
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Citations (1)
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