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Takashi Kiuchi
Takashi Kiuchi
Fujitsu
Optics
Beam (structure)
Proof of concept
Cell Evaluation
Interference (wave propagation)
3
Papers
35
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Multicolumn cell: Evaluation of the proof of concept system
2004
Journal of Vacuum Science & Technology B
Takeshi Haraguchi
T. Sakazaki
Takamasa Satoh
Mitsuhiro Nakano
Shinichi Hamaguchi
Takashi Kiuchi
Hidefumi Yabara
Hiroshi Yasuda
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Citations (9)
Multielectron beam blanking aperture array system SYNAPSE‐2000
1996
Journal of Vacuum Science & Technology B
Hiroshi Yasuda
Soichiro Arai
Junichi Kai
Yoshihisa Ooae
Tomohiko Abe
Shigeru Maruyama
Takashi Kiuchi
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Citations (25)
Accuracy of exposure during continuous stage movement in a variable shaped vector scanning EB lithography system
1993
Microelectronic Engineering
Takashi Kiuchi
Akio Yamada
Yasushi Takahashi
Yoshihisa Oae
Mitsuhiro Nakano
Junichi Kai
Hiroshi Yasuda
Kenichi Kawashima
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Citations (1)
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