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Masami Satoh

Fujitsu

3

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3

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Impact of the coulomb interaction effect on delineating densely repeated 0.1 μm patterns using electron beam block exposure

1997
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Impact of the Coulomb interaction effect on delineating densely repeated 0.1-μm patterns using electron-beam block exposure

1997
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EB lithography for fabricating a GHz SAW filter on LiTaO3 substrate (Poster Paper)

1992
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