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Takayuki Sakakibara
Takayuki Sakakibara
Fujitsu
Cathode ray
Lithography
Coulomb
Optics
Materials science
2
Papers
3
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0
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Impact of the coulomb interaction effect on delineating densely repeated 0.1 μm patterns using electron beam block exposure
1997
K. Takahashi
Satoru Yamazaki
Manabu Ohno
Hitoshi Watanabe
Takayuki Sakakibara
Masami Satoh
Takeo Nagata
Akio Yamada
Hiroshi Yasuda
Yasuo Nara
Nobuo Sasaki
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Impact of the Coulomb interaction effect on delineating densely repeated 0.1-μm patterns using electron-beam block exposure
1997
K. Takahashi
Satoru Yamazaki
Manabu Ohno
Hitoshi Watanabe
Takayuki Sakakibara
Masami Satoh
Takeo Nagata
Akio Yamada
Hiroshi Yasuda
Yasuo Nara
Nobuo Sasaki
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Citations (3)
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