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Bharat Krishnan
Bharat Krishnan
GlobalFoundries
Engineering
Electronic engineering
Residue (complex analysis)
Wafer
Silicon
4
Papers
1
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0
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Effect of defectivity reduction in Spacer and Junction modules on RMG defectivity
2015
ASMC | Advanced Semiconductor Manufacturing Conference
Akshey Sehgal
Sridhar Kuchibhatla
Bharat Krishnan
Dhiman Bhattacharyya
Jing Wan
Hsiao-Chi Peng
Shi You
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Eliminating arsenic containing residue that create killer defects in 20 nm HVM
2015
ASMC | Advanced Semiconductor Manufacturing Conference
Akshey Sehgal
Sridhar Kuchibhatla
Bharat Krishnan
Jing Wan
Hsiao-Chi Peng
Hui Zhan
Jinping Liu
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Effect of Si precursors on micro-loading, morphology and throughput of selective epitaxial growth of si and Si 1−x Ge x
2015
CSTIC | China Semiconductor Technology International Conference
C. Gaire
Bharat Krishnan
Jinping Liu
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Experimental investigation and manufacturing solution of the rapid thermal process induced overlay residue
2012
ASMC | Advanced Semiconductor Manufacturing Conference
Weihua Tong
Really Kim
Bharat Krishnan
Sung Kim
Olivier Vatel
Xuli Liu
Lei Huang
K. Suresh
Miowchin Tan
Vish Srinivasan
Peter Benyon
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