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Shi You

GlobalFoundries

Metal gate
Logic gate
Electronic engineering
Engineering
Planar

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Reduction of "dark gate" defects in replacement-metal-gate process and middle-of-line contacts for advanced planar CMOS and FinFET technology

2016 CSTIC | China Semiconductor Technology International Conference
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Effect of defectivity reduction in Spacer and Junction modules on RMG defectivity

2015 ASMC | Advanced Semiconductor Manufacturing Conference
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