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Miowchin Tan
Miowchin Tan
GlobalFoundries
Sheet resistance
Engineering
Wafer
Silicon
Rapid thermal processing
2
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Experimental investigation and manufacturing solution of the rapid thermal process induced overlay residue
2012
ASMC | Advanced Semiconductor Manufacturing Conference
Weihua Tong
Really Kim
Bharat Krishnan
Sung Kim
Olivier Vatel
Xuli Liu
Lei Huang
K. Suresh
Miowchin Tan
Vish Srinivasan
Peter Benyon
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Cost effective and robust nickel silicidation process qualification and chamber matching in rapid thermal processing tools
2011
ASMC | Advanced Semiconductor Manufacturing Conference
Weihua Tong
K. Suresh
Miowchin Tan
Peter Benyon
Vish Srinivasan
Jinping Liu
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