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Atsushi Gomi
Atsushi Gomi
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Chemical vapor deposition
Physical vapor deposition
Metallurgy
Materials science
3
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14
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0
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Bottom up deposition of advanced iPVD Cu process integrated with iPVD Ti and CVD Ru
2012
Microelectronic Engineering
Tadahiro Ishizaka
Takashi Sakuma
Masaya Kawamata
Osamu Yokoyama
Takara Kato
Atsushi Gomi
Chiaki Yasumuro
Hiroyuki Toshima
Toshihiko Fukushima
Yasushi Mizusawa
Tatsuo Hatano
Masamichi Hara
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基板載置機構、基板処理装置、基板載置機構上への膜堆積抑制方法及び記憶媒体
2008
Atsushi Gomi
Masamichi Hara
Shinji Maekawa
Satoshi Taga
Kaoru Yamamoto
atusi gomi
sinzi maekawa
seidou hara
tosi taga
kaoru yamamoto
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Procede de formation d'une couche metallique au moyen d'un processus d'ecoulement intermittent de gaz precurseur
2004
Hideaki Yamasaki
Tsukasa Matsuda
Atsushi Gomi
Tatsuo Hatano
Mitsuhiro Tachibana
Koumei Matsuzava
Yumiko Kawano
Gert Leusink
F. R. McFeely
Sandra G. Malhotra
Andrew H. Simon
John J. Yurkas
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