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Chiaki Yasumuro
Chiaki Yasumuro
Materials science
Deposition (law)
Alloy
Chemical vapor deposition
Physical vapor deposition
2
Papers
15
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Bottom up deposition of advanced iPVD Cu process integrated with iPVD Ti and CVD Ru
2012
Microelectronic Engineering
Tadahiro Ishizaka
Takashi Sakuma
Masaya Kawamata
Osamu Yokoyama
Takara Kato
Atsushi Gomi
Chiaki Yasumuro
Hiroyuki Toshima
Toshihiko Fukushima
Yasushi Mizusawa
Tatsuo Hatano
Masamichi Hara
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Citations (14)
Bottom up deposition of advanced iPVD Cu process integrated with iPVD Ti and CVD Ru
2010
Tadahiro Ishizaka
Takashi Sakuma
Masaya Kawamata
Osamu Yokoyama
Takara Kato
Gomi Atsushi
Chiaki Yasumuro
Hiroyuki Toshima
Toshihiko Fukushima
Yasushi Mizusawa
Tatsuo Hatano
Masamichi Hara
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Citations (1)
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