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Ahmad Katnani
Ahmad Katnani
GlobalFoundries
Metrology
Nanotechnology
Materials science
Analytical chemistry
CMOS
5
Papers
23
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Beam-Based Defect Localization using Electrons: EBIRCH Overview
2018
Gregory M. Johnson
Zaheer Khan
Christopher D'Aleo
Brian Yates
Michael Iwatake
Ahmad Katnani
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Advanced industrial S/TEM automation and metrology: Boundary of precision
2018
ASMC | Advanced Semiconductor Manufacturing Conference
Haiyan Tan
Weihao Weng
Raghaw Rai
Chris Kang
Laurent Dumas
Irene Brooks
Ahmad Katnani
Zhenxin Zhong
Chris Hakala
Yinggang Lu
John Fretwell
Timothy A. Johnson
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Toward Automated S/TEM Metrology of Advanced CMOS Devices: Journey to Obtain a Precise and Accurate Measurement
2017
Microscopy and Microanalysis
Weihao Weng
Haiyan Tan
Ahmad Katnani
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Cross-sectional atom probe tomography sample preparation for improved analysis of fins on SOI.
2016
Ultramicroscopy
Andrew J. Martin
Weihao Weng
Zhengmao Zhu
Rainer Loesing
James Shaffer
Ahmad Katnani
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Citations (11)
Practical Considerations in Quantitative Nanoscale Energy-Dispersive X-ray Spectroscopy (EDX) and Its Application in SiGe
2015
Microscopy and Microanalysis
Weihao Weng
Frieder H. Baumann
Yue Ke
Rainer Loesing
Anita Madan
Zhengmao Zhu
Ahmad Katnani
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Citations (4)
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