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Johannes Struempfel
Johannes Struempfel
Materials science
Sputtering
Deposition (law)
Cavity magnetron
Optoelectronics
6
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1
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Fully automated inline sputtering for optical coatings
2004
Matthias List
Christian Melde
Johannes Struempfel
Claus Illgen
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Dual magneton sputtering for optical coatings
2001
Johannes Struempfel
Goetz Teschner
C. May
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Vorrichtung zur Sputterbeschichtung mit variierbarem Plasmapotential
1998
Martin Dimer
Johannes Struempfel
Dietmar Schulze
Hans-Christian Dipl.-Phys. Hecht
Klaus Gehm
Paul Dr.rer.nat. Gantenbein
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Verfahren und Vorrichtung zur Regelung der reaktiven Schichtabscheidung auf Substraten mittels längserstreckten Magnetrons
1997
Johannes Struempfel
Werner Lang
Stanley Rehn
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Method and apparatus for controlling the reactive layer deposition on substrates by means of elongated magnetron
1997
Johannes Struempfel
Werner Lang
Stanley Rehn
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Sputter with two elongated magnetron
1996
Johannes Struempfel
Guenter Dipl Phys Dr R Beister
Wolfgang Dipl Ing Erbkamm
Stanley Rehn
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