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Guenter Dipl Phys Dr R Beister
Guenter Dipl Phys Dr R Beister
Homogeneous
Partial discharge
Sputtering
Cavity magnetron
Materials science
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Sputter with two elongated magnetron
1996
Johannes Struempfel
Guenter Dipl Phys Dr R Beister
Wolfgang Dipl Ing Erbkamm
Stanley Rehn
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