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Shinpei Tamura
Shinpei Tamura
Extreme ultraviolet
Photolithography
Optoelectronics
Extreme ultraviolet lithography
Materials science
6
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8
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反射型フォトマスクブランク及びその製造方法、反射型フォトマスク及びその製造方法、並びに、極端紫外光の露光方法
2006
Shusuke Gamo
Shinpei Tamura
nobuhira tamura
hidenori gamou
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Decoupe de masque photographique reflechissant, procede de production de celle-ci, masque photographique reflechissant et procede de production d'un dispositif a semi-conducteurs
2006
Tadashi Matsuo
Koichiro Kanayama
Shinpei Tamura
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Evaluation of bi-layer TaSix absorber on buffer for EUV mask
2006
Koichiro Kanayama
Shinpei Tamura
Yasushi Nishiyama
Masashi Kawashita
Tadashi Matsuo
Akira Tamura
Susumu Nagashige
Kenji Hiruma
Doo-Hoon Goo
Iwao Nishiyama
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Optimization of TaSix absorber stack for EUV mask
2006
Shinpei Tamura
Koichiro Kanayama
Yasushi Nishiyama
Tadashi Matsuo
Akira Tamura
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反射型フォトマスクブランク、反射型フォトマスク、ならびにこれを用いたパターン転写方法
2005
Koichiro Kanayama
Tadashi Matsuo
Yasushi Nishiyama
Shinpei Tamura
sei matuo
nobuhira tamura
yasufumi nisiyama
kouitirou kanayama
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