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kouitirou kanayama
kouitirou kanayama
Photomask
Semiconductor device
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Optoelectronics
Materials science
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Reflection type photomask blank and a method of manufacturing the same, the reflection type photomask as well, a method of manufacturing a semiconductor device
2006
sei matuo
nobuhira tamura
kouitirou kanayama
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極端紫外線露光用マスク、マスクブランク、及び露光方法
2005
Koichiro Kanayama
Tadashi Matsuo
Yasushi Nishiyama
sei matuo
yasufumi nisiyama
kouitirou kanayama
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反射型フォトマスクブランク、反射型フォトマスク、ならびにこれを用いたパターン転写方法
2005
Koichiro Kanayama
Tadashi Matsuo
Yasushi Nishiyama
Shinpei Tamura
sei matuo
nobuhira tamura
yasufumi nisiyama
kouitirou kanayama
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