author-photo

N.M. Russell

4

Papers

28

Citations

Citation Trend

Filter By

Papers (3) Sort By

Journal Conference Others

Understanding and eliminating defects in electroplated Cu films

2001 IITC | International Interconnect Technology Conference
Show All
- Source
- Cite
- Save
Citations (5)
Damascene integration of copper and ultra-low-k xerogel for high performance interconnects

1997 IEDM | International Electron Devices Meeting
Show All
- Source
- Cite
- Save
Citations (23)
Applications of fs lasers to nonlinear spectroscopy and process control of Si(001) interfaces

1996 LEOS | Lasers and Electro-Optics Society Meeting
Show All
- Source
- Cite
- Save
Citations (0)