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S. Zuhoski
S. Zuhoski
Manufacturing engineering
Engineering
Sigma
production testing
Optoelectronics
2
Papers
5
Citations
0
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Understanding and eliminating defects in electroplated Cu films
2001
IITC | International Interconnect Technology Conference
Jiong-Ping Lu
L. Chen
D. González
H. L. Guo
D. J. Rose
M. Marudachalam
W.U. Hsu
H. Y. Liu
F. Cataldi
Basab Chatterjee
Patricia B. Smith
P. J. Holverson
Richard L. Guldi
N.M. Russell
Gregory B. Shinn
S. Zuhoski
J.D. Luttmer
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Citations (5)
Marathon and IRONMAN/sup TM/ testing of the Trikon Technologies Sigma ForceFill/sup TM/
1997
ASMC | Advanced Semiconductor Manufacturing Conference
J. Strupp
D. González
D. McKeon
M. Saran
R. Mena
S. Zuhoski
P. Niemyski
P. J. Holverson
N. Carrington
D. Butler
C. Dobson
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1