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Eden Zielinski
Eden Zielinski
Texas Instruments
Materials science
Electronic engineering
Dielectric
Lithography
Arc (geometry)
10
Papers
70
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Effects of dielectric liners on TDDB lifetime of a Cu/ low-k interconnect
2004
IITC | International Interconnect Technology Conference
Ting Y. Tsui
Phil Matz
Ralf B Willecke
Eden Zielinski
Tae Kim
Gaddi S. Haase
Joe W. McPherson
Abha Singh
Andrew J. McKerrow
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Inorganic antireflective coating process for deep-UV lithography
1998
Qizhi He
Wei W. Lee
Maureen A. Hanratty
D. Rogers
Guoqiang Xing
Abha Singh
Eden Zielinski
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Inorganic ARC for 0.18pm and Sub-O.18p.m Multilevel Metal Interconnects
1998
International Interconnect Technology Conference
Wei W. Lee
Qizhi He
G. Xing
Abha Singh
Eden Zielinski
Ken Brennan
Girish A. Dixit
Kelly J. Taylor
Chien-Sung Liang
Bob Havemann
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Dimensional metrology challenges for ULSI interconnects
1998
Characterization and Metrology for ULSI Technology
Robert H. Havemann
Herschel M. Marchman
Girish A. Dixit
Manoj K. Jain
Eden Zielinski
A. Ralston
Y. Hsu
Changming Jin
Abha Singh
J. Schlesinger
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Damascene integration of copper and ultra-low-k xerogel for high performance interconnects
1997
IEDM | International Electron Devices Meeting
Eden Zielinski
Stephen W. Russell
Richard Scott List
A. M. Wilson
C Jin
K. J. Newton
Jiong-Ping Lu
T. Hurd
Wei-Yung Hsu
V. T. Cordasco
M. Gopikanth
V. Korthuis
Wei William Lee
G. Cerny
N.M. Russell
Patricia B. Smith
Robert H. Havemann
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Citations (23)
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