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Guohui Cai
Guohui Cai
Semiconductor Manufacturing International Corporation
Materials science
Electronic engineering
Wafer
Ion implantation
Optoelectronics
3
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Investigation of embedded silicon germanium typical defect solution for advanced CMOS process
2016
CSTIC | China Semiconductor Technology International Conference
Huojin Tu
Yonggen He
Youfeng He
Jialei Liu
Lan Jin
Guohui Cai
Yu Liu
Yujian Huang
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Device performance improvement with implantation balancing energy contamination and productivity
2016
IWJT | International Workshop on Junction Technology
Yonggen He
Guohui Cai
Zuyuan Zhou
Youfeng He
Jingang Wu
David Wei Zhang
Ting Cai
Junfeng Lu
Ganming Zhao
Baonian Guo
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Investigation of Si Implantation into ILD (Interlayer Dielectric) for film property modification
2014
IWJT | International Workshop on Junction Technology
Yonggen He
Guohui Cai
Zuyuan Zhou
Youfeng He
Jie Zhao
Weiji Song
Shaofeng Yu
Jingang Wu
Junfeng Lu
Ganming Zhao
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