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Junfeng Lu
Junfeng Lu
Applied Materials
Ion implantation
Materials science
Electronic engineering
Wafer
Analytical chemistry
3
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Device performance improvement with implantation balancing energy contamination and productivity
2016
IWJT | International Workshop on Junction Technology
Yonggen He
Guohui Cai
Zuyuan Zhou
Youfeng He
Jingang Wu
David Wei Zhang
Ting Cai
Junfeng Lu
Ganming Zhao
Baonian Guo
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Investigation of Si Implantation into ILD (Interlayer Dielectric) for film property modification
2014
IWJT | International Workshop on Junction Technology
Yonggen He
Guohui Cai
Zuyuan Zhou
Youfeng He
Jie Zhao
Weiji Song
Shaofeng Yu
Jingang Wu
Junfeng Lu
Ganming Zhao
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Investigation of nitrogen and carbon co-implantation under room temperature and cryo-condition
2012
Yonggen He
Bing Wu
Guobin Yu
Yong Chen
Hailong Liu
Youfeng He
Haibo Dai
Jingang Wu
David Wei Zhang
Junfeng Lu
Jingrui Xu
Baonian Guo
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