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Zuyuan Zhou
Zuyuan Zhou
Semiconductor Manufacturing International Corporation
Materials science
Electronic engineering
Ion implantation
Dimer
Doping
3
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Device performance improvement with implantation balancing energy contamination and productivity
2016
IWJT | International Workshop on Junction Technology
Yonggen He
Guohui Cai
Zuyuan Zhou
Youfeng He
Jingang Wu
David Wei Zhang
Ting Cai
Junfeng Lu
Ganming Zhao
Baonian Guo
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Investigation of Si Implantation into ILD (Interlayer Dielectric) for film property modification
2014
IWJT | International Workshop on Junction Technology
Yonggen He
Guohui Cai
Zuyuan Zhou
Youfeng He
Jie Zhao
Weiji Song
Shaofeng Yu
Jingang Wu
Junfeng Lu
Ganming Zhao
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Arsenic Dimer (As2+) Lightly Doped Drain (LDD) Implantation Study for 20nm Logic Device Development
2014
Hao Sun
Yong Li
Shuai Zhang
Xinyun Xie
Gorge Cai
Zuyuan Zhou
Xuejie Shi
Yonggen He
Weimin Shi
Jianhua Ju
Larry Chen
Shaofeng Yu
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