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Weiji Song
Weiji Song
Dielectric
Wafer
Materials science
Gate dielectric
CMOS
2
Papers
1
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Investigation of Si Implantation into ILD (Interlayer Dielectric) for film property modification
2014
IWJT | International Workshop on Junction Technology
Yonggen He
Guohui Cai
Zuyuan Zhou
Youfeng He
Jie Zhao
Weiji Song
Shaofeng Yu
Jingang Wu
Junfeng Lu
Ganming Zhao
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Investigation of different post HK annealing impact on HK film property and device performance
2014
Yonggen He
David Wei Zhang
Hailong Liu
Yong Chen
Guobing Yu
Youfeng He
Lan Jin
Jiaqi Wu
Jie Zhao
Weiji Song
Shaofeng Yu
Jingang Wu
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