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Michael E. Elta
- University of Michigan
42
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834
Citations
0.03
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Citations (9) - 1995 Aiche Journal
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Citations (19) - Real-time feedback control of reactive ion etching of amorphous silicon for thin film transistor fabShow All
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Citations (0) - Real-time control of reactive ion etching of amorphous silicon for thin film transistor applications
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Citations (4) -
- P. J. Hargis
- K. E. Greenberg
- P. A. Miller
- J. B. Gerardo
- John R. Torczynski
- Merle E. Riley
- G. A. Hebner
- J. R. Roberts
- James K. Olthoff
- James R. Whetstone
- R. J. Van Brunt
- Mark A. Sobolewski
- Harold M. Anderson
- Michael P. Splichal
- J. L. Mock
- Peter Bletzinger
- Alan Garscadden
- Richard A. Gottscho
- Gary S. Selwyn
- M. Dalvie
- J. E. Heidenreich
- Jeffery W. Butterbaugh
- M. L. Brake
- Michael L. Passow
- J. Pender
- A. Lujan
- Michael E. Elta
- David B. Graves
- Herbert H. Sawin
- Mark J. Kushner
- J. T. Verdeyen
- R. Horwath
- T. R. Turner
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Citations (19) -
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