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M. Dalvie

IBM

25

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686

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Across wafer etch rate uniformity in a high density plasma reactor: Experiment and modeling

1995 Applied Physics Letters
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THE BOLTZMANN-POISSON SYSTEM IN WEAKLY COLLISIONAL SHEATHS

1994
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Device for controlling plasma irregularities, and plasma generating method

1994
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The Gaseous Electronics Conference radio‐frequency reference cell: A defined parallel‐plate radio‐frequency system for experimental and theoretical studies of plasma‐processing discharges

1994 Review of Scientific Instruments
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A shock-tracking algorithm for surface evolution under reactive-ion etching

1993 Journal of Applied Physics
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Detection of particle traps by spatially resolved optical emission spectroscopy over grooved electrodes in radio frequency discharges

1993 Applied Physics Letters
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Moment analysis of rf parallel-plate-discharge simulations using the particle-in-cell with Monte Carlo collisions technique

1993 Physical Review E
- Maheswaran Surendra
- M. Dalvie
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Ponderomotive force and ion energy distributions in an rf sheath.

1992 Physical Review Letters
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Dynamical N-body simulations of Coulomb scattering in plasma sheaths.

1992 Physical Review A
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Flux considerations in the coupling of Monte Carlo plasma sheath simulations with feature evolution models

1992 IEEE Transactions on Electron Devices
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Citations (27)