Old Web
English
Sign In
Acemap
>
authorDetail
>
Hossein Etemad
Hossein Etemad
University of Michigan
Control engineering
Process control
Engineering
Real-time Control System
Advanced process control
4
Papers
104
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (3)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Control of semiconductor manufacturing equipment: real-time feedback control of a reactive ion etcher
1995
IEEE Transactions on Semiconductor Manufacturing
Brian A. Rashap
Michael E. Elta
Hossein Etemad
Jeffrey P. Fournier
James S. Freudenberg
Martin D. Giles
Jessy W. Grizzle
Pierre T. Kabamba
Pramod P. Khargonekar
StCphane Lafortune
James Moyne
Demosthenis Teneketzis
Fred L. Terry
Show All
Source
Cite
Save
Citations (66)
Run-to-run control framework for VLSI manufacturing
1994
James Moyne
Hossein Etemad
Michael E. Elta
Show All
Source
Cite
Save
Citations (19)
Applications of Control to Semiconductor Manufacturing: Reactive Ion Etching
1993
ACC | American Control Conference
Michael E. Elta
Hossein Etemad
J. S. Freudenberg
M. D. Giles
Jessy W. Grizzle
Pierre T. Kabamba
Pramod P. Khargonekar
Stéphane Lafortune
Semyon M. Meerkov
James Moyne
Brian A. Rashap
Demosthenis Teneketzis
Fred L. Terry
Show All
Source
Cite
Save
Citations (17)
1