Old Web
English
Sign In
Acemap
>
authorDetail
>
syou kodera
syou kodera
Materials science
Nanoelectromechanical systems
Nanotechnology
Chemical-mechanical planarization
Microelectromechanical systems
7
Papers
0
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (5)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
20306 ECMPの研磨圧力依存性シミュレーション(OS3 機械工学が支援する微細加工技術(半導体・MEMS・NEMS)(2),オーガナイズドセッション)
2010
mei fukuda
syou kodera
yasusi touma
saku suzuki
hirosi kuni hiyama
tosirou toi
syuuhei kurokawa
osamu oonisi
Show All
Source
Cite
Save
Citations (0)
21710 次世代平坦化技術の比較(平坦化,OS.12 機械工学が支援する微細加工技術(半導体・MEMS・NEMS))
2007
gen takasi obata
yutaka wada
katuhiko tokusige
mei fukunaga
gaku tuzimura
yasusi touma
saku suzuki
syou kodera
Show All
Source
Cite
Save
Citations (0)
電解複合研磨(ECMP)液の開発
2007
syou kodera
yasusi touma
saku suzuki
koukou saitou
hirosi kuni hiyama
gen takasi obata
yutaka wada
gaku tuzimura
Show All
Source
Cite
Save
Citations (0)
基板配線形成方法、基板配線形成装置、及びめっき抑制物質転写スタンプ
2005
Hirokuni Hiyama
Akira Kodera
syou kodera
hirosi kuni hiyama
Show All
Source
Cite
Save
Citations (0)
Planarization method and planarization apparatus
2005
yutaka wada
syou kodera
gen takasi obata
koukou saitou
yasusi touma
saku suzuki
Show All
Source
Cite
Save
Citations (0)
1