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21710 次世代平坦化技術の比較(平坦化,OS.12 機械工学が支援する微細加工技術(半導体・MEMS・NEMS))
21710 次世代平坦化技術の比較(平坦化,OS.12 機械工学が支援する微細加工技術(半導体・MEMS・NEMS))
2007
gen takasi obata
yutaka wada
katuhiko tokusige
mei fukunaga
gaku tuzimura
yasusi touma
saku suzuki
syou kodera
Keywords:
Electronic engineering
Nanoelectromechanical systems
Microelectromechanical systems
Chemical-mechanical planarization
Materials science
Nanotechnology
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