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Marlene Strobl
Marlene Strobl
Infineon Technologies
Substrate (chemistry)
Materials science
Nozzle
Composite material
Multiple exposure
5
Papers
3
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Verfahren zur Durchführung einer Doppel- oder Mehrfachbelichtung
2003
Jens Uwe Bruch
Heiko Hommen
Karl Schumacher
Jens Stäcker
Marlene Strobl
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Comparison of new film nozzle with standard nozzle for aqueous puddle developing of photomasks
2003
Christian Buergel
Werner Saule
Marlene Strobl
Peter Dress
Anatol Schwersenz
Martin Tschinkl
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Mask, the mask substrate holder and method for performing a double or multiple exposure with the mask and the mask substrate holder
2003
Jens Uwe Bruch
Heiko Hommen
Karl Schumacher
Jens Stäcker
Marlene Strobl
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Duesenanordnung for applying a liquid to a substrate
2003
Anatol Schwersenz
Werner Saule
Andreas Noering
Peter Dress
Christian Buergel
Martin Tschinkl
Marlene Strobl
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Nozzle arrangement for applying a fluid to a substrate
2002
Christian Bürgel
Peter Dr. Dreß
Andreas Nöring
Werner Saule
Anatol Schwersenz
Marlene Strobl
Martin Tschinkl
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