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Werner Saule

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Global CD uniformity improvement for CAR masks by adaptive post-exposure bake with CD measurement feedback

2004
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Global CD uniformity improvement for CAR masks by adaptive post-exposure bake with CD measurement feedback

2004
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Comparison of new film nozzle with standard nozzle for aqueous puddle developing of photomasks

2003
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Nozzle arrangement for applying a fluid to a substrate

2002
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