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Thierry Conard

Katholieke Universiteit Leuven
IMEC

234

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3086

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Carbon nanotube EUV pellicle tunability and performance in a scanner-like environment

2021
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Engineering high quality and conformal ultrathin SiNx films by PEALD for downscaled and advanced CMOS nodes

2021 Journal of Vacuum Science and Technology
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Nanomechanical Characterization of Organic Surface Passivation Films on 50 nm Patterns during Area-Selective Deposition

2021
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Characterization of bonding activation sequences to enable ultra-low Cu/SiCN wafer level hybrid bonding

2021 ECTC | Electronic Components and Technology Conference
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Achieving reproducible data: Examples from surface analysis in semiconductor technology

2020 Journal of Vacuum Science and Technology
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Surface analysis in the semiconductor industry: Present use and future possibilities

2020 Surface and Interface Analysis
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(Invited) Application of a Laboratory-Based Scanning XPS/Haxpes Instrument for the Characterization of Buried Interfaces

2020
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(Invited) Si-Cap-Free Low-DIT SiGe Gate Stack for High-Performance pFETs

2020
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Self-focusing SIMS: A metrology solution to area selective deposition

2019 Applied Surface Science
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Material-selective doping of 2D TMDC through AlxOy encapsulation

2019 ACS Applied Materials & Interfaces
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