Marathon and IRONMAN/sup TM/ testing of the Trikon Technologies Sigma ForceFill/sup TM/
1997
This paper focuses on the testing and improvement of the Trikon Technologies Sigma ForceFill/sup TM/ tool installed in a pilot line at the TI Dallas Productization Fab, DPI. A series of five tests were run on the system to determine its viability as a volume production tool.
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