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Oliver Wilhelmi
Oliver Wilhelmi
Lund University
LIGA
Resist
Materials science
Lithography
X-ray lithography
3
Papers
30
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Concept, construction and commissioning of an alignment system for deep X-ray lithography
2002
Microelectronic Engineering
Oliver Wilhelmi
Serguei Peredkov
Alexei L. Bogdanov
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Citations (3)
Comparison of PMMA and SU-8 resist moulds for embossing of PZT to produce high-aspect-ratio microstructures using LIGA process
2002
Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems
A. Schneider
B. Su
T.W. Button
Laurence Singleton
Oliver Wilhelmi
Se Huq
Pd Prewett
Ra Lawes
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Citations (12)
Deep x-ray lithography with the SU-8 resist
2001
Laurence Singleton
Alexei L. Bogdanov
Serguei Peredkov
Oliver Wilhelmi
Andreas Schneider
Carsten Cremers
Stephan Megtert
Andreas Schmidt
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Citations (15)
1