LIGA

LIGA is a German acronym for Lithographie, Galvanoformung, Abformung (Lithography, Electroplating, and Molding) that describes a fabrication technology used to create high-aspect-ratio microstructures.A nozzle for uranium enrichment.A 517 µm tall copper coplanar waveguide.Active part of a 2x2 optical switch, only the electrostatic actuator is shown.Detail of the moulding tool for the LIGA microspectrometer.X-ray refractive x-ray lenses made of SU8 polymer. The patterns are made by tilting the mask and substrate in the beam twice by +-45°. LIGA is a German acronym for Lithographie, Galvanoformung, Abformung (Lithography, Electroplating, and Molding) that describes a fabrication technology used to create high-aspect-ratio microstructures. The LIGA consists of three main processing steps; lithography, electroplating and molding. There are two main LIGA-fabrication technologies, X-Ray LIGA, which uses X-rays produced by a synchrotron to create high-aspect ratio structures, and UV LIGA, a more accessible method which uses ultraviolet light to create structures with relatively low aspect ratios.