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Laurence Singleton

Carl Zeiss AG

10

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Mask technologies for deep x-ray LIGA

2003
- Laurence Singleton
- Peter Detemple
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Variants of LIGA technology for the production of plastic microcomponents

2003
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Embossing of 3D ceramic microstructures

2002 Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems
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Design of experiments optimization of PMMA for LIGA applications

2002
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Two-dimensional metallic photonic band-gap crystals fabricated by LIGA

2002 Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems
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SU-8 as resist material for deep X-ray lithography

2001 Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems
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Citations (52)