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Naoyo Yamamoto
Naoyo Yamamoto
Electronic engineering
Sputtering
Magnetic field
Electrode
Optoelectronics
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Development of a Minimal multi-target helicon sputtering tool
2018
ISSM | International Symposium on Semiconductor Manufacturing
Kazunori Takahashi
Taichi Saito
Hiroyuki Kawasaki
Hayato Chiba
Naoyo Yamamoto
Hisashi Mizuguchi
Michihiro Inoue
Shiro Hara
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