Old Web
English
Sign In
Acemap
>
authorDetail
>
Taichi Saito
Taichi Saito
Tohoku University
Sputtering
Optoelectronics
Magnetic field
Helicon
Atomic physics
4
Papers
4
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (4)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Minimal multi-target plasma sputtering tool
2019
Vacuum
Kazunori Takahashi
Taichi Saito
Akira Ando
Yuki Yabuta
Hisashi Mizuguchi
Naoko Yamamoto
Ryuichiro Kamei
Shiro Hara
Show All
Source
Cite
Save
Citations (3)
Enhancement of downstream plasma density by a stepped-diameter radiofrequency plasma source under a static magnetic field for a compact sputtering reactor
2019
Vacuum
Taichi Saito
Kazunori Takahashi
Akira Ando
Shiro Hara
Show All
Source
Cite
Save
Citations (1)
Inhibitation of substrate heating in a Minimal Multi-Target Helicon sputtering tool
2018
ISSM | International Symposium on Semiconductor Manufacturing
Taichi Saito
Kazunori Takahashi
Akira Ando
Shiro Hara
Show All
Source
Cite
Save
Citations (0)
Development of a Minimal multi-target helicon sputtering tool
2018
ISSM | International Symposium on Semiconductor Manufacturing
Kazunori Takahashi
Taichi Saito
Hiroyuki Kawasaki
Hayato Chiba
Naoyo Yamamoto
Hisashi Mizuguchi
Michihiro Inoue
Shiro Hara
Show All
Source
Cite
Save
Citations (0)
1