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Hisashi Mizuguchi
Hisashi Mizuguchi
Sputtering
Magnetic field
Optoelectronics
Helicon
Electronic engineering
2
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3
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0
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Minimal multi-target plasma sputtering tool
2019
Vacuum
Kazunori Takahashi
Taichi Saito
Akira Ando
Yuki Yabuta
Hisashi Mizuguchi
Naoko Yamamoto
Ryuichiro Kamei
Shiro Hara
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Citations (3)
Development of a Minimal multi-target helicon sputtering tool
2018
ISSM | International Symposium on Semiconductor Manufacturing
Kazunori Takahashi
Taichi Saito
Hiroyuki Kawasaki
Hayato Chiba
Naoyo Yamamoto
Hisashi Mizuguchi
Michihiro Inoue
Shiro Hara
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