Development of a Minimal multi-target helicon sputtering tool

Kazunori Takahashi,Taichi Saito,Hiroyuki Kawasaki,Hayato Chiba,Naoyo Yamamoto,Hisashi Mizuguchi,Michihiro Inoue,Shiro Hara

Development of a Minimal multi-target helicon sputtering tool

2018

Kazunori Takahashi
Taichi Saito
Hiroyuki Kawasaki
Hayato Chiba
Naoyo Yamamoto
Hisashi Mizuguchi
Michihiro Inoue
Shiro Hara

A Minimal multi-target helicon sputtering tool is developed to deposit a multi-layer metallic film for electrodes and interconnection wires in the Minimal Fab System.

Keywords:

Electronic engineering
Sputtering
Magnetic field
Electrode
Optoelectronics
Engineering
Helicon
Radio frequency
Interconnection
multi target
plasma density

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