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P. Kurz
P. Kurz
Carl Zeiss AG
Applied mathematics
Microanalysis
Computer science
Mathematics education
X-ray lithography
2
Papers
9
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Final Report for Lith 112 High-NA Optics for the Micro-Exposure Tool (MET)
2001
John S. Taylor
P Gabella
Russell M. Hudyma
Gary E. Sommargren
D. W. Phillion
A Johnson
Regina Soufli
E. Spiller
Layton C. Hale
Todd A. Decker
Eric M. Gullikson
P. Kurz
Udo Dinger
Guenther Seitz
Frank Eisert
Stefan Schulte
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Optics for EUV lithography
2000
MNC | International Microprocesses and Nanotechnology Conference
P. Kurz
Heinz Mann
Martin Antoni
Wolfgang Singer
Michael Mühlbeyer
Frank Melzer
Udo Dinger
Martin Weiser
Siegfried Stacklies
Guenther Seitz
F. Haidl
E. Sohmen
Winfried Kaiser
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Citations (9)
1