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Michael Mühlbeyer
Michael Mühlbeyer
X-ray lithography
Optics
Materials science
Photolithography
Immersion lithography
2
Papers
9
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Système de projection à six miroirs pour la microlithographie
2001
Udo Dinger
Hans-Jürgen Mann
Michael Mühlbeyer
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Optics for EUV lithography
2000
MNC | International Microprocesses and Nanotechnology Conference
P. Kurz
Heinz Mann
Martin Antoni
Wolfgang Singer
Michael Mühlbeyer
Frank Melzer
Udo Dinger
Martin Weiser
Siegfried Stacklies
Guenther Seitz
F. Haidl
E. Sohmen
Winfried Kaiser
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Citations (9)
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