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Final Report for Lith 112 High-NA Optics for the Micro-Exposure Tool (MET)
Final Report for Lith 112 High-NA Optics for the Micro-Exposure Tool (MET)
2001
John S. Taylor
P Gabella
Russell M. Hudyma
Gary E. Sommargren
D. W. Phillion
A Johnson
Regina Soufli
E. Spiller
Layton C. Hale
Todd A. Decker
Eric M. Gullikson
P. Kurz
Udo Dinger
Guenther Seitz
Frank Eisert
Stefan Schulte
Keywords:
Applied mathematics
Microanalysis
Computer science
Mathematics education
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