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Takuya Ozaki
Takuya Ozaki
IFS AB
Optoelectronics
Beam (structure)
Materials science
Atomic layer deposition
Etching
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2024
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High Electron Mobility Germanium FinFET Fabricated by Neutarl Beam
2021
The Japan Society of Applied Physics
Daisuke Ohori
Shuichi Noda
Takuya Fujii
Wataru Mizubayashi
Kazuhiko Endo
Yiming Li
Yao-Jen Lee
Takuya Ozaki
Seiji Samukawa
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Investigation of Atomic-layer Defect-free Ge Etching by HBr Neutral Beam
2019
The Japan Society of Applied Physics
Daisuke Ohori
Takuya Fujii
Shuichi Noda
Wataru Mizubayashi
Kazuhiko Endo
Yiming Li
Yao-Jen Lee
Takuya Ozaki
Seiji Samukawa
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High quality silicon dioxide by low temperature neutral beam enhanced atomic layer deposition
2019
The Japan Society of Applied Physics
HuaHsuan Chen
Daisuke Ohori
Takuya Ozaki
Mitsuya Utsuno
Tomohiro Kubota
Toshihisa Nozawa
Seiji Samukawa
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Investigation of Side-wall Etching for Germanium Fin Strcutre by Neutral Beam Etching
2019
The Japan Society of Applied Physics
Daisuke Ohori
Shuichi Noda
Takuya Fujii
Wataru Mizubayashi
Kazuhiko Endo
En-Tzu Lee
Yiming Li
Yao-Jen Lee
Takuya Ozaki
Seiji Samukawa
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