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Takuya Fujii

IFS AB

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High Electron Mobility Germanium FinFET Fabricated by Neutarl Beam

2021 The Japan Society of Applied Physics
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Investigation of Atomic-layer Defect-free Ge Etching by HBr Neutral Beam

2019 The Japan Society of Applied Physics
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Investigation of Side-wall Etching for Germanium Fin Strcutre by Neutral Beam Etching

2019 The Japan Society of Applied Physics
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