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Investigation of Side-wall Etching for Germanium Fin Strcutre by Neutral Beam Etching
Investigation of Side-wall Etching for Germanium Fin Strcutre by Neutral Beam Etching
2019
Daisuke Ohori
Shuichi Noda
Takuya Fujii
Wataru Mizubayashi
Kazuhiko Endo
En-Tzu Lee
Yiming Li
Yao-Jen Lee
Takuya Ozaki
Seiji Samukawa
Keywords:
Germanium
Etching
Materials science
Fin
Beam (structure)
Optoelectronics
Correction
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