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T. Shimamura
T. Shimamura
Nippon Telegraph and Telephone
Electronic engineering
Electrode
Fabrication
Silicon on insulator
Optical switch
2
Papers
5
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Effect of Scratch Stress on the Surface Hardness and Inner Structures of a Capacitive Fingerprint Sensor LSI
2007
IRPS | International Reliability Physics Symposium
Nobuhiro Shimoyama
S. Shigematsu
Hiroki Morimura
T. Shimamura
Toshihiko Kumazaki
Mamoru Nakanishi
Hiromu Ishii
Katsuyuki Machida
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Fabrication of optical MEMS switches having multilevel mirror-drive electrodes
2003
MEMS | IEEE/LEOS International Conference on Optical MEMS
Hiroyuki Ishii
Yasuyuki Tanabe
T. Shimamura
J. Yamaguchi
Masami Urano
Toshikazu Kamei
Kazuhisa Kudou
Masaki Yano
Yuji Uenishi
K. Machida
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