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J. Yamaguchi
J. Yamaguchi
Nippon Telegraph and Telephone
Electrode
Optoelectronics
Materials science
Fabrication
Silicon on insulator
2
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25
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Improved single crystalline mirror actuated electrostatically by terraced electrodes with high-aspect ratio torsion spring
2003
MEMS | IEEE/LEOS International Conference on Optical MEMS
R. Sawada
J. Yamaguchi
E. Higurashi
A. Shimizu
T. Yamamoto
Nobuyuki Takeuchi
Yuji Uenishi
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Fabrication of optical MEMS switches having multilevel mirror-drive electrodes
2003
MEMS | IEEE/LEOS International Conference on Optical MEMS
Hiroyuki Ishii
Yasuyuki Tanabe
T. Shimamura
J. Yamaguchi
Masami Urano
Toshikazu Kamei
Kazuhisa Kudou
Masaki Yano
Yuji Uenishi
K. Machida
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